• Patent #7,618,027 covers unique humidification delivery process
"The ability to deliver precise amounts of water vapor into a carrier gas eliminates the need for bubblers and direct liquid injectors that are prone to clogging and calibration issues," said RASIRC founder and president Jeffrey Spiegelman. "The RainMaker controls the amount of water vapor based strictly on the gas pressure and water temperature, and can deliver from micro-grams to grams of water vapor into gas flows from 20 sccm to thousands of liters into vacuum, atmosphere, or high pressures."
RASIRC's patented process keeps water from mixing with the gas. It also keeps the pressure of water and gas relatively independent of each other. By keeping water pressure below gas pressure, water droplet entrainment into the process gas can be eliminated for better control and film uniformity.
A hydrophilic membrane excludes particles, micro-droplets, volatile gases, and ionic contaminants. Unlike nebulizers, bubblers, and other spray type vaporizers, the RHS prevents water droplets from entering the process, enabling better film uniformity. This makes the RHS particularly well suited for micro-electronics and photovoltaic cell manufacturing processes.
About RASIRC
RASIRC products purify and deliver ultra pure liquids and gases. RASIRC technology is the first to generate ultra high purity (UHP) steam from de-ionized water. It reduces cost, increases yield, and improves safety. RASIRC dryers, humidifiers, and steam generators are of critical importance for many applications in the semiconductor, pharmaceutical, medical, biological, fuel cell, and power industries. Custom systems are available upon request. Call 858-259-1220, e-mail [email protected], or visit www.rasirc.com.
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